Kawasaki Cleanroom NX520

Awaiting more stock

The NX520 with 2 links, rigid double arm structure that can easily reach the wafer stages with a high performance space of 200 wafers per hour (WPH) from FOUP to the aligner, and then to the stage with a double arm manipulator, meets the standards of ISO Class 1, standard SEMI-F47 system of immediate solution to the voltage drop and restart of the automatic system when voltage is restored, standard SEMI-S2 environmental protection, personal safety, anti-collision system.
 

Controller D
 
D controllers are designed to develop clean room applications comprising a complete digital servo process, standard Ethernet communication port, compact footprint, flexible development of different software, independent operation of two arms and multi-axis controls, uniform servo amplifiers for all axes, standards environmental, health and safety SEMI S2, white room ISO 1.
 
Specification of the D60 controller
  • Servo complete digital system
  • Controlled Axes: Maximum 7 axes
  • Manual, semi-automatic, fully automatic teaching.
  • External emergency stop, near security, external stop.
  • Hardware: RS232C x 1 Ethernet.
  • Software: K-Utility (original Kawasaki communication command for clean robots).
  • Energy: Voltage: Single-phase, AC208 V ± 10%, 50/60 Hz. Standard: SEMI F47.
  • Input signal: Maximum 16 channels.
  • Output signal: Maximum of 8 channels
  • Compatible robots series: NS, NT, NX, TT, TX and NV
Specification of the D61 controller
  • Servo complete digital system
  • Controlled Axes: Maximum 12 axes
  • Manual, semi-automatic, fully automatic teaching.
  • External emergency stop, near security, external stop.
  • Hardware: RS232C x 2 Ethernet.
  • Software: K-Utility (original Kawasaki communication command for clean robots).
  • Energy: Voltage: Single-phase, AC208 V ± 10%, 50/60 Hz. Standard: SEMI F47.
  • Input signal: Maximum 96 channels
  • Output signal: Maximum of 80 channels
  • Compatible robots series: NS, NT, NX, TT, TX and NV
Main specifications
 
Number of axis: 5
ISO Class 1
Link: 2
Repeatability:  ± 0.1 mm (wafer center)
Controller: D60/D61
 
Motion range (°)
 
θ axis
(rotation JT2)
330°
440 mm
Z axis
(up-down JT3)
832 mm
336°
X axis
(in/out JT4)
 
W axis - lower
 (rotation JT6)
336 °
W axis - upper
(rotation JT7)
 

Robot applications

Cleanroom

 


Applications

Handling of parts , Assembly of parts

Pictures

Diagrams